1.

Conference Proceedings
Conference Proceedings
1. Crystal Chemistry and Cation Ordering in Zirconolite 2M
Lumpkin G. R. ; Whittle, K.R. ; Howard, C.J. ; Zhang, Z. ; Berry, F.J. ; Oates, G. ; Williams, C.T. ; Zaitsev, A.N.
Pub. info.: Scientific basis for nuclear waste management XXIX : symposium held September 12-16, 2005, Ghent, Belgium.  pp.639-646,  2006.  Warrendale.  Materials Research Society
Title of ser.: Materials Research Society symposium proceedings
Ser. no.: 932
2.

Conference Proceedings
Conference Proceedings
2. Status of fabrication of square-format masks for extreme-ultraviolet lithography (EUVL) at the MCoC
Racette, K.C. ; Williams, C.T. ; Fisch, E. ; Kindt, L. ; Lawliss, M. ; Ackel, R. ; Lercel, M.J.
Pub. info.: Emerging Lithographic Technologies VI.  Part One  pp.161-172,  2002.  Bellingham, Wash..  SPIE-The International Society for Optical Engineering
Title of ser.: Proceedings of SPIE - the International Society for Optical Engineering
Ser. no.: 4688
3.

Conference Proceedings
Conference Proceedings
3. EUVL mask fabrication for the 45-nm node
Fisch, E. ; Kindt, L. ; Lercel, M.J. ; Racette, K.C. ; Williams, C.T.
Pub. info.: Photomask and Next-Generation Lithography Mask Technology IX.  pp.865-871,  2002.  Bellingham, Wash..  SPIE-The International Society for Optical Engineering
Title of ser.: Proceedings of SPIE - the International Society for Optical Engineering
Ser. no.: 4754
4.

Conference Proceedings
Conference Proceedings
4. EPL mask fabrication
Lercel, M.J. ; Williams, C.T. ; Lawliss, M. ; Ackel, R. ; Kindt, L. ; Fisch, E.
Pub. info.: Photomask and Next-Generation Lithography Mask Technology IX.  pp.790-798,  2002.  Bellingham, Wash..  SPIE-The International Society for Optical Engineering
Title of ser.: Proceedings of SPIE - the International Society for Optical Engineering
Ser. no.: 4754