1.

Conference Proceedings

Conference Proceedings
Tyrrell, B. ; Fritze, M. ; Mallen, R.D. ; Wheeler, B. ; Rhyins, P.D. ; Martin, P.M.
Pub. info.: Design, process integration, and characterization for microelectronics : 6-7 March 2002, Santa Clara, USA.  pp.503-516,  2002.  Bellingham, Wash..  SPIE-The International Society for Optical Engineering
Title of ser.: Proceedings of SPIE - the International Society for Optical Engineering
Ser. no.: 4692
2.

Conference Proceedings

Conference Proceedings
Fritze, M. ; Tyrrell, B. ; Mallen, R.D. ; Wheeler, B. ; Rhyins, P.D. ; Martin, P.M.
Pub. info.: Design and process integration for microelectronic manufacturing II : 26-28 February 2003, Santa Clara, California, USA.  pp.15-29,  2003.  Bellingham, Wash..  SPIE-The International Society for Optical Engineering
Title of ser.: Proceedings of SPIE - the International Society for Optical Engineering
Ser. no.: 5042
3.

Conference Proceedings

Conference Proceedings
Fritze, M. ; Mallen, R.D. ; Wheeler, B. ; Yost, D. ; Snyder, J.P. ; Kasprowicz, B.S. ; Eynon, B.G. ; Liu, H.-Y.
Pub. info.: Optical Microlithography XVI.  Part One  pp.327-343,  2003.  Bellingham, Wash..  SPIE-The International Society for Optical Engineering
Title of ser.: Proceedings of SPIE - the International Society for Optical Engineering
Ser. no.: 5040