Yao, P. ; Schneider, G.J. ; Miao, B. ; Prather, D.W. ; Wetzel, E.D. ; O'Brien, D.J.
Pub. info.:
Micromachining technology for micro-optics and nano-optics III : 25-27 January 2005, San JOse, California, USA. pp.27-35, 2005. Bellingham, Wash.. SPIE - The International Society of Optical Engineering
Title of ser.:
Proceedings of SPIE - the International Society for Optical Engineering
Micromachining technology for micro-optics and nano-optics III : 25-27 January 2005, San JOse, California, USA. pp.9-17, 2005. Bellingham, Wash.. SPIE - The International Society of Optical Engineering
Title of ser.:
Proceedings of SPIE - the International Society for Optical Engineering