Blank Cover Image

Silicon on Insulator Characterization Techniques and Results*

Author(s):
Wetteroth,T.  
Publication title:
Proceedings of the Electrochemical Society Symposium on Diagnostic Techniques for Semiconductor Materials and Devices
Title of ser.:
Proceedings of SPIE - the International Society for Optical Engineering
Ser. no.:
3322
Pub. Year:
1997
Page(from):
177
Page(to):
186
Pub. info.:
Pennington, NJ: SPIE-The International Society for Optical Engineering
ISSN:
0277786X
ISBN:
9780819427656 [0819427659]
Language:
English
Call no.:
P63600/3322
Type:
Conference Proceedings

Similar Items:

1 Conference Proceedings Silicon on Insulator Characterization Techniques and Results

Wetteroth, T.

Electrochemical Society
7 Conference Proceedings Far- and near-field characterization of a photonic-crystal-based microcavity on silicon-on-insulator

Cluzel, B., Gerard, D., Picard, E., Charvolin, T., Calvo, V., Hadji, E., de Fornel, F.

SPIE - The International Society of Optical Engineering
2 Conference Proceedings Residual stress in C54 Ti disilicide formed in silicon on insulator

Chen, C, Tn, K N, Wetteroth, T, Wilson, S R

Electrochemical Society
8 Conference Proceedings Silicon-Framed Tensile Specimens: Techniques and Results

Read, D. T.

MRS - Materials Research Society
3 Conference Proceedings Characterization of the Activation-Relaxation technique: Recent Results on Models of Amorphous Silicon

Malek, Rachid, Mousseau, Normand, Barkema, G.T.

Materials Research Society
9 Conference Proceedings Characterization of integrated Bragg gratings on silicon-on-insulator rib waveguides

Chan, S.P., Passaro, V.M.N., Lim, S.T., Png, C.E., Headley, W., Masanovic, G., Reed, Graham T., Atta, R.M.H., Ensell, …

SPIE - The International Society of Optical Engineering
4 Conference Proceedings Optical Characterization of Silicon-on-Insulator

Li, G. G., Forouhi, A. R., Bloomer, I., Auberton-Herve, A., Wittkower, A.

MRS - Materials Research Society
10 Conference Proceedings Characterization of interfaces in silicon-on-insulator structure

Kang, S.G., Ryoo, K., Kim, H.R., Seo, G., Lee, S.H., Kim, D.S., Hong, P.Y

Electrochemical Society
5 Conference Proceedings CHARACTERIZATION OF THIN-FILM BESOI USING A CVD Si1x-y-Gex-By ETCH STOP

Desmond, C.A., Hunt, C.E., Wetteroth, T.

Electrochemical Society
11 Conference Proceedings PHOTOREFLECTANCE CHARACTERIZATION OF SILICON FILMS ON INSULATOR

Giordana, Adraina, Glosser, R., Pellegrino, Joseph G., Qadri, S., Twigg, M. E., Richmond, E. D., Joyner, Keith, Pollack, …

Materials Research Society
6 Conference Proceedings CHARACTERIZATION OF DIRECTLY BONDED SILICON-ON-INSULATOR STRUCTURES USING SPECTROSCOPIC ELLIPSOMETRY

T. Saitoh, M.E. El-Ghazzawi, T. Oka, N. Natsuaki

Electrochemical Society
12 Conference Proceedings Strained Silicon-On-Insulator - Fabrication and Characterization

M. Reiche, C. Himcinschi, U. Gösele, S. Christiansen, S. Mantl, D. Buca, Q. Zhao, S. Feste, R. Loo, D. Nguyen, W. …

Electrochemical Society
1
 
2
 
3
 
4
 
5
 
6
 
7
 
8
 
9
 
10
 
11
 
12