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Plasma processing and synthesis of materials III : symposium held April 17-19, 1990, San Francisco, California, U.S.A.. pp.191-198, 1991. Pittsburgh, Pa.. Materials Research Society
Erdtmann, M. ; Carroll, M. ; Carlin, I. ; Langdo, T. ; Westhoff, R. ; Leitz, C. ; Yang, V. ; Currie, M. ; Lochtefeld, T. ; Petrocelli, K. ; Vineis, C. ; Badawi, H. ; Bulsara, M.
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State-of-the-art program on compound semiconductors XXXIX and nitride and wide bandgap semiconductors for sensors, photonics, and electronics IV : proceedings of the international symposia. pp.106-117, 2003. Pennington, N.J.. Electrochemical Society
Srivastava, A. ; Sun, J. ; Bellur, K. ; Bartholomew, R. ; O'Neil, P. ; Celik, M. ; Osburn, C.M. ; Masnari, N.A. ; OEztuerk, M.C. ; Westhoff, R. ; Fowler, B.
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ULSI science and technology, 1997 : proceedings of the Sixth International Symposium on Ultralarge Scale Integration Science and Technology. pp.571-586, 1997. Pennington, NJ. Electrochemical Society
Plasma processing and synthesis of materials III : symposium held April 17-19, 1990, San Francisco, California, U.S.A.. pp.213-220, 1991. Pittsburgh, Pa.. Materials Research Society
Dilawari, A. H. ; Szekely, J. ; Westhoff, R. ; Detering, B. A. ; Shaw Jr., C. B,
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Plasma processing and synthesis of materials III : symposium held April 17-19, 1990, San Francisco, California, U.S.A.. pp.199-206, 1991. Pittsburgh, Pa.. Materials Research Society
Peterson, J. J. ; Hunt, C. E. ; Zappe, S. F. ; Obermeier, E. ; Westhoff, R. ; Robinson, M.
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III-V and IV-IV materials and processing challenges for highly integrated microelectronics and optoelectronics : symposium held November 30-December 3, 1998, Boston, Massachusetts, U.S.A.. pp.293-, 1999. Warrendale, PA. MRS - Materials Research Society
Westhoff, R. ; Carlin, J. ; Erdtmann, M. ; Langdo, T. ; Leitz, C. ; Y., V. ; Petrocelli, K. ; Bulsara, M. ; Fitzgerald, E.A. ; Vineis, C. (AmberWave Systems Corp)
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SiGe: materials, processing, and devices : proceedings of the First international symposium. pp.589-600, 2004. Pennington, N.J.. Electrochemical Society