1.

Conference Proceedings

Conference Proceedings
Trapaga, C. ; Westhoff, R. ; Szekely, J. ; Fincle, J. ; Swank, W. D.
Pub. info.: Plasma processing and synthesis of materials III : symposium held April 17-19, 1990, San Francisco, California, U.S.A..  pp.191-198,  1991.  Pittsburgh, Pa..  Materials Research Society
Title of ser.: Materials Research Society symposium proceedings
Ser. no.: 190
2.

Conference Proceedings

Conference Proceedings
Erdtmann, M. ; Carroll, M. ; Carlin, I. ; Langdo, T. ; Westhoff, R. ; Leitz, C. ; Yang, V. ; Currie, M. ; Lochtefeld, T. ; Petrocelli, K. ; Vineis, C. ; Badawi, H. ; Bulsara, M.
Pub. info.: State-of-the-art program on compound semiconductors XXXIX and nitride and wide bandgap semiconductors for sensors, photonics, and electronics IV : proceedings of the international symposia.  pp.106-117,  2003.  Pennington, N.J..  Electrochemical Society
Title of ser.: Electrochemical Society Proceedings Series
Ser. no.: 2003-11
3.

Conference Proceedings

Conference Proceedings
Srivastava, A. ; Sun, J. ; Bellur, K. ; Bartholomew, R. ; O'Neil, P. ; Celik, M. ; Osburn, C.M. ; Masnari, N.A. ; OEztuerk, M.C. ; Westhoff, R. ; Fowler, B.
Pub. info.: ULSI science and technology, 1997 : proceedings of the Sixth International Symposium on Ultralarge Scale Integration Science and Technology.  pp.571-586,  1997.  Pennington, NJ.  Electrochemical Society
Title of ser.: Electrochemical Society Proceedings Series
Ser. no.: 97-3
4.

Conference Proceedings

Conference Proceedings
Westhoff, R. ; Dilawari, A. H. ; Szekely, J.
Pub. info.: Plasma processing and synthesis of materials III : symposium held April 17-19, 1990, San Francisco, California, U.S.A..  pp.213-220,  1991.  Pittsburgh, Pa..  Materials Research Society
Title of ser.: Materials Research Society symposium proceedings
Ser. no.: 190
5.

Conference Proceedings

Conference Proceedings
Dilawari, A. H. ; Szekely, J. ; Westhoff, R. ; Detering, B. A. ; Shaw Jr., C. B,
Pub. info.: Plasma processing and synthesis of materials III : symposium held April 17-19, 1990, San Francisco, California, U.S.A..  pp.199-206,  1991.  Pittsburgh, Pa..  Materials Research Society
Title of ser.: Materials Research Society symposium proceedings
Ser. no.: 190
6.

Conference Proceedings

Conference Proceedings
Peterson, J. J. ; Hunt, C. E. ; Zappe, S. F. ; Obermeier, E. ; Westhoff, R. ; Robinson, M.
Pub. info.: III-V and IV-IV materials and processing challenges for highly integrated microelectronics and optoelectronics : symposium held November 30-December 3, 1998, Boston, Massachusetts, U.S.A..  pp.293-,  1999.  Warrendale, PA.  MRS - Materials Research Society
Title of ser.: Materials Research Society symposium proceedings
Ser. no.: 535
7.

Conference Proceedings

Conference Proceedings
Westhoff, R. ; Carlin, J. ; Erdtmann, M. ; Langdo, T. ; Leitz, C. ; Y., V. ; Petrocelli, K. ; Bulsara, M. ; Fitzgerald, E.A. ; Vineis, C. (AmberWave Systems Corp)
Pub. info.: SiGe: materials, processing, and devices : proceedings of the First international symposium.  pp.589-600,  2004.  Pennington, N.J..  Electrochemical Society
Title of ser.: Electrochemical Society Proceedings Series
Ser. no.: 2004-07