Automated defect cross-sectioning with an in-line DualBeam
- Author(s):
Blanc-Coquand, S. ( STMicroelectronics (France) ) Hinschberger, B. ( STMicroelectronics (France) ) Rouchouze, E. ( STMicroelectronics (France) ) Sicurani, E. ( CEA-LETI (France) ) Castagna, M. ( FEI Co. (USA) ) Weschler, M. ( FEI Co. (USA) ) Dworkin, L. ( FEI Co. (USA) ) Renard, D. ( FEI Co. (USA) ) Panyasak, A. ( FEI Co. (USA) ) - Publication title:
- Metrology, Inspection, and Process Control for Microlithography XVIII
- Title of ser.:
- Proceedings of SPIE - the International Society for Optical Engineering
- Ser. no.:
- 5375
- Pub. Year:
- 2004
- Page(from):
- 819
- Page(to):
- 826
- Pages:
- 8
- Pub. info.:
- Bellingham, Wash.: SPIE - The International Society of Optical Engineering
- ISSN:
- 0277786X
- ISBN:
- 9780819452887 [0819452882]
- Language:
- English
- Call no.:
- P63600/5375.2
- Type:
- Conference Proceedings
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