1.

Conference Proceedings

Conference Proceedings
Lowell, John ; Wenner, Valerie ; Jastrzebski, Lubek
Pub. info.: Surface chemical cleaning and passivation for semiconductor processing.  pp.339-,  1993.  Pittsburgh, PA.  MRS - Materials Research Society
Title of ser.: Materials Research Society symposium proceedings
Ser. no.: 315
2.

Conference Proceedings

Conference Proceedings
Lowell, John ; Wenner, Valerie ; Debusk, Damon
Pub. info.: Ultraclean semiconductor processing technology and surface chemical cleaning and passivation : Symposum held April 17-19, 1995, San Francisco, California, USA.  pp.207-,  1995.  Pittsburgh, PA.  MRS - Materials Research Society
Title of ser.: Materials Research Society symposium proceedings
Ser. no.: 386