LPCVD POLYCRYSTALLINE SILICON THIN FILMS: THE EVOLUTION OF STRUCTURE, TEXTURE AND STRESS
- Author(s):
Krulevitch, R. Nguyen, Tai D. Johnson, G.C. Howe, R.T. Wenk, H.R. Gronsky, R. - Publication title:
- Evolution of thin-film and surface microstructure : symposium held November 26-December 1, 1990, Boston, Massachusetts, U.S.A.
- Title of ser.:
- Materials Research Society symposium proceedings
- Ser. no.:
- 202
- Pub. Year:
- 1991
- Page(from):
- 167
- Page(to):
- 172
- Pages:
- 6
- Pub. info.:
- Pittsburgh, Pa.: Materials Research Society
- ISSN:
- 02729172
- ISBN:
- 9781558990944 [1558990941]
- Language:
- English
- Call no.:
- M23500/202
- Type:
- Conference Proceedings
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