Silicon Carbon Nitride Films Deposited by ECR CVD
- Author(s):
Chen, K-H. Wu, J.-J. Wen, C.-Y. Chen, L-C. Fan, C.-W Kuo, P.-F. Chen, Y.-F. Huang, Y.-S. - Publication title:
- Proceedings of the State-of-the-Art Program on Compound Semiconductors (SOTAPOCs XXX)
- Title of ser.:
- Electrochemical Society Proceedings Series
- Ser. no.:
- 99-4
- Pub. Year:
- 1999
- Page(from):
- 13
- Page(to):
- 24
- Pages:
- 12
- Pub. info.:
- Pennington, N. J.: Electrochemical Society
- ISSN:
- 01616374
- ISBN:
- 9781566772266 [1566772265]
- Language:
- English
- Call no.:
- E23400/99-4
- Type:
- Conference Proceedings
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