1.

Conference Proceedings

Conference Proceedings
Jain,K. ; Dunn,T.J. ; Farmiga,N. ; Zemel,M. ; Weisbecker,C. ; Lee,T.
Pub. info.: Emerging lithographic technologies II : 23-25 February 1998, Santa Clara, California.  pp.207-213,  1998.  Bellingham, Wash., USA.  SPIE-The International Society for Optical Engineering
Title of ser.: Proceedings of SPIE - the International Society for Optical Engineering
Ser. no.: 3331
2.

Conference Proceedings

Conference Proceedings
Jain,K. ; Dunn,T.J. ; Farmiga,N. ; Zemel,M. ; Weisbecker,C.
Pub. info.: Emerging lithographic technologies II : 23-25 February 1998, Santa Clara, California.  pp.197-206,  1998.  Bellingham, Wash., USA.  SPIE-The International Society for Optical Engineering
Title of ser.: Proceedings of SPIE - the International Society for Optical Engineering
Ser. no.: 3331