1.

Conference Proceedings
Conference Proceedings
1. Investigation of immersion related defects using pre-and post-wet experiments [6154-29]
Brandl, S. ; Watso, R. ; Pierson, B. ; Holmes, S. ; Wei, Y. ; Petrillo, K. ; Cummings, K. ; Goodwin, F.
Pub. info.: Optical Microlithography XIX.  pp.61540T-,  2006.  Bellingham, Wash..  SPIE - The International Society of Optical Engineering
Title of ser.: Proceedings of SPIE - the International Society for Optical Engineering
Ser. no.: 6154
2.

Conference Proceedings
Conference Proceedings
2. Optical path and image performance monitoring of a full-field 157-nm scanner
Wells, G. ; Hermans, J. ; Watso, R. ; Kang, Y.-S. ; Morton, R. ; Kocsis, M.K. ; Okoroanyanwu, U. ; De Bisschop, P. ; Stepanenko, N. ; Ronse, K.G.
Pub. info.: Optical Microlithography XVII.  pp.91-98,  2004.  Bellingham, Wash..  SPIE - The International Society of Optical Engineering
Title of ser.: Proceedings of SPIE - the International Society for Optical Engineering
Ser. no.: 5377