1.

Conference Proceedings
Conference Proceedings
1. Q-Gabor wavelet
Tanaka,M. ; Watanabe,T. ; Mishima,T.
Pub. info.: Vision geometry X : 29-30 July 2001, San Diego, USA.  pp.97-108,  2001.  Bellingham, Wash..  SPIE-The International Society for Optical Engineering
Title of ser.: Proceedings of SPIE - the International Society for Optical Engineering
Ser. no.: 4476
2.

Conference Proceedings
Conference Proceedings
2. Current status of ASET-HIT EUV phase-shifting point diffraction interferometer
Gomel,Y. ; Sugisaki,K. ; Zhu,Y. ; Niibe,M. ; Watanabe,T. ; Kinoshita,H.
Pub. info.: Soft X-ray and EUV imaging systems II : 31 July-1 August 2001, San Diego, USA.  pp.39-45,  2001.  Bellingham, Wash., USA.  SPIE-The International Society for Optical Engineering
Title of ser.: Proceedings of SPIE - the International Society for Optical Engineering
Ser. no.: 4506
3.

Conference Proceedings
Conference Proceedings
3. Automatic high-precision calibration system for angle encoder
Watanabe,T. ; Fujimoto,H. ; Nakayama,K. ; Masuda,T. ; Kajitani,M.
Pub. info.: Recent developments in traceable dimensional measurements : 20-21 June 2001, Munich, Germany.  pp.267-274,  2001.  Bellingham, Wash..  SPIE-The International Society for Optical Engineering
Title of ser.: Proceedings of SPIE - the International Society for Optical Engineering
Ser. no.: 4401
4.

Conference Proceedings
Conference Proceedings
4. New particle-inspection system for CMP-planarization-processed metal layers
Ikota,M. ; Sugimoto,A. ; Inoue,Y. ; Taguchi,J. ; Watanabe,T.
Pub. info.: Metrology, inspection, and process control for microlithography XII : 23-25 February 1998, San Clara, California.  pp.336-345,  1998.  Bellingham, Wash., USA.  SPIE-The International Society for Optical Engineering
Title of ser.: Proceedings of SPIE - the International Society for Optical Engineering
Ser. no.: 3332
5.

Conference Proceedings
Conference Proceedings
5. Progress in the development of three-aspherical mirror optics for EUVL
Kinoshita,H. ; Watanabe,T. ; Bajuk,D.J. ; Daniel,J. ; Kimpara,Y. ; Kriese,M.D. ; Platonov,Y.Y.
Pub. info.: EUV, x-ray, and neutron optics and sources : 21-23 July 1999, Denver, Colorado.  pp.164-171,  1999.  Bellingham, Wash..  SPIE - The International Society for Optical Engineering
Title of ser.: Proceedings of SPIE - the International Society for Optical Engineering
Ser. no.: 3767
6.

Conference Proceedings
Conference Proceedings
6. Fabrication of dielectric-coated silver hollow nickel waveguide with multiple inner dielectric layers for Er:YAG laser light trnsmission
Watanabe,T. ; Hiraga,H. ; Abe,Y. ; Miyagi,M.
Pub. info.: Proceedings of biomedical systems and technologies : 8-10 September 1996, Vienna, Austria.  pp.19-27,  1996.  Bellingham, Wash..  SPIE-The International Society for Optical Engineering
Title of ser.: Proceedings of SPIE - the International Society for Optical Engineering
Ser. no.: 2928
7.

Conference Proceedings
Conference Proceedings
7. New die-to-database mask inspection system with i-line optics for 256-Mb and 1-Gb DRAMs
Tabata,M. ; Yamashita,K. ; Tsuchiya,H. ; Nomura,T. ; Inoue,H. ; Watanabe,T. ; Tojo,T. ; Yoshino,H.
Pub. info.: Photomask and X-ray mask technology IV : 17-18 April, 1997, Kawasaki, Japan.  pp.415-422,  1997.  Bellingham, Washington.  SPIE-The International Society for Optical Engineering
Title of ser.: Proceedings of SPIE - the International Society for Optical Engineering
Ser. no.: 3096
8.

Conference Proceedings
Conference Proceedings
8. Design of imaging system for EUVL
Kinoshita,H. ; Watanabe,T. ; Koike,M. ; Namioka,T.
Pub. info.: Materials, manufacturing, and measurement for synchrotron radiation mirrors : 30-31 July 1997, San Diego, California.  pp.211-220,  1997.  Bellingham, Wash., USA.  SPIE-The International Society for Optical Engineering
Title of ser.: Proceedings of SPIE - the International Society for Optical Engineering
Ser. no.: 3152
9.

Conference Proceedings
Conference Proceedings
9. Three-aspherical-mirror system for EUV lithography (Invited Paper)
Kinoshita,H. ; Watanabe,T. ; Niibe,M. ; Ito,M. ; Oizumi,H. ; Yamanashi,H. ; Murakami,K. ; Oshino,T. ; Platonov,Y.Y. ; Grupido,N.
Pub. info.: Emerging lithographic technologies II : 23-25 February 1998, Santa Clara, California.  pp.20-31,  1998.  Bellingham, Wash., USA.  SPIE-The International Society for Optical Engineering
Title of ser.: Proceedings of SPIE - the International Society for Optical Engineering
Ser. no.: 3331
10.

Conference Proceedings
Conference Proceedings
10. TuA2:L/G recording with 0.45-ｦﾌm track pitch in CAD-MSR｡ｦdisk.
Murakami,Y. ; Maeda,S. ; Takahashi,A. ; Tanaka,Y. ; Watanabe,T.
Pub. info.: ISOM/ODS '99 : joint international symposium on Optical Memory and Optical Data Strage 1999, 11-15 July 1999 Sheraton Kauai Resort, Koloa, Howaii.  pp.69-71,  1999.  Bellingham, Washington.  SPIE - The International Society for Optical Engineering
Title of ser.: Proceedings of SPIE - the International Society for Optical Engineering
Ser. no.: 3864