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13 results

Conference Proceedings

1. Laser mask repair system LM700A

Ueda,A. ; Yoshino,Y. ; Morishige,Y. ; Watanabe,S. ; Kyusho,Y. ; Haneda,T. ; Ohmiya,M.

Pub. info.:	Photomask and Next-Generation Lithography Mask Technology VIII. pp.574-582, 2001. Bellingham, Wash.. SPIE-The International Society for Optical Engineering
Title of ser.:	Proceedings of SPIE - the International Society for Optical Engineering
Ser. no.:	4409

Conference Proceedings

2. Coronary calcification diagnosis system based on helical CT images

Ukai,Y. ; Niki,N. ; Satoh,H. ; Watanabe,S. ; Ohmatsu,H. ; Eguchi,K. ; Moriyama,N.

Pub. info.:	Medical imaging 1998, Image processing : 23-26 February 1998, San Diego, California. Part 2 pp.1482-1489, 1998. Bellingham, Washington. SPIE-The International Society for Optical Engineering
Title of ser.:	Proceedings of SPIE - the International Society for Optical Engineering
Ser. no.:	3338

Conference Proceedings

3. Hierarchical processing for accurate optical proximity correction for 1-Gb DRAM metal layers

Kobayashi,S. ; Uno,T. ; Yamamoto,K. ; Tanaka,S. ; Kotani,T. ; Inoue,S. ; Higurashi,H. ; Watanabe,S. ; Yano,M. ; Ohki,S. ; Tsunakawa,K.

Pub. info.:	Optical microlithography XII : 17-19 March 1999, Santa Clara, California. Part2 pp.614-621, 1999. Bellingham, Wash., USA. SPIE - The International Society for Optical Engineering
Title of ser.:	Proceedings of SPIE - the International Society for Optical Engineering
Ser. no.:	3679

Conference Proceedings

4. Precise micromaterial processing by excimer laser ablation

Uchida,Y. ; Yamada,J. ; Higa,S. ; Kathuria,Y.P. ; Tsuboi,A. ; Watanabe,S. ; Hayashi,N. ; Furuhashi,H.

Pub. info.:	International Conference on Fiber Optics and Photonics: Selected Papers from Photonics India '96. pp.37-42, 1997. Bellingham, Wash.. SPIE-The International Society for Optical Engineering
Title of ser.:	Proceedings of SPIE - the International Society for Optical Engineering
Ser. no.:	3211

Conference Proceedings

5. YAG laser system with combined beams from three oscillators and its application to materials processing

Miura,H. ; Fujinaga,S. ; Narikiyo,T. ; Ohmori,A. ; Okino,K. ; Watanabe,S.

Pub. info.:	XI International Symposium on Gas Flow and Chemical Lasers and High-Power Laser Conference : 25-30 August 1996, Heriot-Watt University, Edinburgh, UK. pp.736-739, 1997. Bellingham, Wash., USA. SPIE-The International Society for Optical Engineering
Title of ser.:	Proceedings of SPIE - the International Society for Optical Engineering
Ser. no.:	3092

Conference Proceedings

6. High-accuracy laser mask repair system LM700A

Yoshino,Y. ; Morishige,Y. ; Watanabe,S. ; Kyusho,Y. ; Ueda,A. ; Haneda,T. ; Oomiya,M.

Pub. info.:	20th Annual BACUS Symposium on Photomask Technology. pp.663-669, 2000. Bellingham, Wash.. SPIE-The International Society for Optical Engineering
Title of ser.:	Proceedings of SPIE - the International Society for Optical Engineering
Ser. no.:	4186

Conference Proceedings

7. Spectral measurement of ultra line-narrowed F2 laser

Wakabayashi,O. ; Sakuma,J. ; Suzuki,T. ; Kubo,H. ; Kitatochi,N. ; Suganuma,T. ; Nakaike,T. ; Kumazaki,T. ; Hotta,K. ; Mizoguchi,H. ; Nakao,K. ; Togashi,T. ; Nabekawa,Y. ; Watanabe,S.

Pub. info.:	Optical Microlithography XIV. 4346 pp.1066-1073, 2001. Bellingham, Wash.. SPIE-The International Society for Optical Engineering
Title of ser.:	Proceedings of SPIE - the International Society for Optical Engineering
Ser. no.:	4346

Conference Proceedings

8. Interactive Trap System Model and the Behavior of Thermoluminescence Glow Peaks

Sunta,C.M. ; Ayta,W.E.F.Feria ; Watanabe,S.

Pub. info.:	Proceedings of the 13th International Conference on Defects in Insulating Materials, ICDIM 96, July 15-19, 1996, Wake Forest University, Winston-Salem, NC 27109, USA. pp.745-748, 1997. Zurich, Switzerland. Trans Tech Publications
Title of ser.:	Materials science forum
Ser. no.:	239-241

Conference Proceedings

9. Theoretical and Experimental Studies of Irradiation-Induced Grain Boundary Migration depending on Orientation

Takahashi,H. ; Sakaguchi,N. ; Hashimoto,N. ; Watanabe,S.

Pub. info.:	Intergranular and interphase boundaries in materials : iib95 : proceedings of the 7th International Conference on Intergranular and Interphase Boundaries in Materials held in Lisboa, Portugal, June 26-29, 1995. pp.561-564, 1996. Zurich-Uetikon, Switzerland. Trans Tech Publications
Title of ser.:	Materials science forum
Ser. no.:	207-209

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Conference Proceedings

10. Advantages of SOI technology in low-voltage ULSIs (Invited Paper)

Yoshimi,M. ; Kawanaka,S. ; Yamada,T. ; Terauchi,M. ; Shino,T. ; Fuse,T. ; Oowaki,Y. ; Watanabe,S.

Pub. info.:	Microelectronic Device Technology : 1-2 October 1997, Austin, Texas. pp.178-187, 1997. Bellingham, Wash., USA. SPIE-The International Society for Optical Engineering
Title of ser.:	Proceedings of SPIE - the International Society for Optical Engineering
Ser. no.:	3212

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Author: Watanabe,S.