1.

Conference Proceedings

Conference Proceedings
Washio, K.
Pub. info.: ULSI Process Integration : proceedings of the International Symposium.  pp.155-164,  2001.  Pennington, N.J..  Electrochemical Society
Title of ser.: Electrochemical Society Proceedings Series
Ser. no.: 2001-2
2.

Conference Proceedings

Conference Proceedings
Washio, K. ; Kouta, H.
Pub. info.: Photon Processing in Microelectronics and Photonics.  pp.561-570,  2002.  Bellingham, Wash..  SPIE-The International Society for Optical Engineering
Title of ser.: Proceedings of SPIE - the International Society for Optical Engineering
Ser. no.: 4637