1.

Conference Proceedings
Conference Proceedings
1. Fabrication of MEMS Tonpilz Transducers
Zhou, Q.F. ; Wang, L.-P. ; Gerber, G. ; Meyer, R. Jr., ; Tol, D. Van ; Tadigadapa, S. ; Hughes, W.J. ; Trolier-McKinstry, S.
Pub. info.: Materials science of microelectromechanical systems (MEMS) devices IV : symposium held November 25-28, 2001, Boston, Massachusetts, U.S.A..  pp.161-166,  2002.  Warrendale, Pa..  Materials Research Society
Title of ser.: Materials Research Society symposium proceedings
Ser. no.: 687
2.

Conference Proceedings
Conference Proceedings
2. Wet-Etch Patterning of Lead Zirconate Titanate (PZT) Thick Films for Microelectromechanical Systems (MEMS) Applications
Wang, L.-P. ; Wolf, R. ; Zhou, Q. ; Trolier-McKinstry, S. ; Davis, R.J.
Pub. info.: Materials science of microelectromechanical systems (MEMS) devices III : symposium held November 27-28, 2000, Boston, Massachusetts, U.S.A..  2001.  Warrendale, Pa..  Materials Research Society
Title of ser.: Materials Research Society symposium proceedings
Ser. no.: 657