1.

Conference Proceedings

Conference Proceedings
Schulze,H.-J. ; Frohnmeyer,A. ; Niedernostheide,F.-J. ; Hille,F. ; Tutto,P. ; Pavelka,T. ; Wachutka,G.
Pub. info.: High Purity Silicon VI : proceedings of the sixth International Symposium.  4218  pp.414-424,  2000.  Pennington, N.J., Bellingham, Wash..  Electrochemical Society — SPIE-The International Society for Optical Engineering
Title of ser.: Proceedings of SPIE - the International Society for Optical Engineering
Ser. no.: 4218
2.

Conference Proceedings

Conference Proceedings
Wachutka,G.
Pub. info.: Design, test, and microfabrication of MEMS and MOEMS : 30 March-1 April 1999, Paris, France.  Part1  pp.12-19,  1999.  Bellingham, Wash., USA.  SPIE - The International Society for Optical Engineering
Title of ser.: Proceedings of SPIE - the International Society for Optical Engineering
Ser. no.: 3680