Design, test, integration, and packaging of MEMS/MOEMS 2002 : 6-8 May, 2002, Cannes, France. pp.20-27, 2002. Bellingham, Wash.. SPIE-The International Society for Optical Engineering
Title of ser.:
Proceedings of SPIE - the International Society for Optical Engineering
Silicon carbide and related materials 2001 : ICSCRM2001, proceedings of the International Conference on Silicon Carbide and Related Materials 2001, Tsukuba, Japan, October 28-November 2, 2001. pp.1153-1156, 2002. Zuerich, Switzerland. Trans Tech Publications
Silicon carbide and related materials 2002 : ECSCRM2002, proceedings of the 4th European Conference on Silicon Carbide and Related Materials, September 2-5, 2002, Linköping, Sweden. pp.839-842, 2003. Zuerich, Switzerland. Trans Tech Publications
Niedernostheide, F.-J. ; Schulze, H.-J. ; Kellner-Werdehausen, U. ; Frohnmeyer, A. ; Wachutka, G.
Pub. info.:
Crystalline defects and contamination: their impact and control in device manufacturing III : DECON 2001 : proceedings of the Satellite Symposium to ESSDERC 2001, Nuremberg, Germany. pp.112-120, 2001. Pennington, N.J.. Electrochemical Society
Silicon carbide and related materials 2001 : ICSCRM2001, proceedings of the International Conference on Silicon Carbide and Related Materials 2001, Tsukuba, Japan, October 28-November 2, 2001. pp.1153-1156, 2002. Zuerich, Switzerland. Trans Tech Publications