M. Plat ; W.R. Brunsvold ; R.S. Smith ; N.K. Eib ; C.F. Lyons
Pub. info.:
Advances in resist technology and processing XII : 20-22 February 1995, Santa Clara, California. pp.272-281, 1995. Bellingham, WA. Society of Photo-optical Instrumentation Engineers
Title of ser.:
Proceedings of SPIE - the International Society for Optical Engineering
D. Bucca ; A. Aviram ; D.E. Seeger ; W.E. Conley ; W.R. Brunsvold
Pub. info.:
Advances in resist technology and processing XII : 20-22 February 1995, Santa Clara, California. pp.403-412, 1995. Bellingham, WA. Society of Photo-optical Instrumentation Engineers
Title of ser.:
Proceedings of SPIE - the International Society for Optical Engineering
Advances in resist technology and processing XII : 20-22 February 1995, Santa Clara, California. pp.125-142, 1995. Bellingham, WA. Society of Photo-optical Instrumentation Engineers
Title of ser.:
Proceedings of SPIE - the International Society for Optical Engineering