1.

Conference Proceedings

Conference Proceedings
M. Plat ; W.R. Brunsvold ; R.S. Smith ; N.K. Eib ; C.F. Lyons
Pub. info.: Advances in resist technology and processing XII : 20-22 February 1995, Santa Clara, California.  pp.272-281,  1995.  Bellingham, WA.  Society of Photo-optical Instrumentation Engineers
Title of ser.: Proceedings of SPIE - the International Society for Optical Engineering
Ser. no.: 2438
2.

Conference Proceedings

Conference Proceedings
D. Bucca ; A. Aviram ; D.E. Seeger ; W.E. Conley ; W.R. Brunsvold
Pub. info.: Advances in resist technology and processing XII : 20-22 February 1995, Santa Clara, California.  pp.403-412,  1995.  Bellingham, WA.  Society of Photo-optical Instrumentation Engineers
Title of ser.: Proceedings of SPIE - the International Society for Optical Engineering
Ser. no.: 2438
3.

Conference Proceedings

Conference Proceedings
J.T. Fahey ; W.E. Conley ; W.R. Brunsvold ; D.C. Yang ; W.M. Moreau
Pub. info.: Advances in resist technology and processing XII : 20-22 February 1995, Santa Clara, California.  pp.125-142,  1995.  Bellingham, WA.  Society of Photo-optical Instrumentation Engineers
Title of ser.: Proceedings of SPIE - the International Society for Optical Engineering
Ser. no.: 2438