1.

Conference Proceedings

Conference Proceedings
W. M. Lytle ; H. Shin ; D. N. Ruzic
Pub. info.: Metrology, inspection, and process control for microlithography XXI.  2007.  Bellingham, Wash..  SPIE - The International Society of Optical Engineering
Title of ser.: Proceedings of SPIE - the International Society for Optical Engineering
Ser. no.: 6518
2.

Conference Proceedings

Conference Proceedings
W. M. Lytle ; D. S. Szybilski ; C. E. Das ; R. Raju ; V. Surla
Pub. info.: Lithography Asia 2008.  1  pp.71401S-1-71401S-9,  2008.  Bellingham, Wash..  Society of Photo-optical Instrumentation Engineers
Title of ser.: Proceedings of SPIE - the International Society for Optical Engineering
Ser. no.: 7140
3.

Conference Proceedings

Conference Proceedings
D. N. Ruzic ; R. Raju ; J. Sporre ; H. Shin ; W. M. Lytle
Pub. info.: Lithography Asia 2008.  1  pp.714006-1-714006-12,  2008.  Bellingham, Wash..  Society of Photo-optical Instrumentation Engineers
Title of ser.: Proceedings of SPIE - the International Society for Optical Engineering
Ser. no.: 7140
4.

Conference Proceedings

Conference Proceedings
W. M. Lytle ; R. Raju ; H. Shin ; C. Das ; M. J. Neumann
Pub. info.: Metrology, inspection, and process control for microlithography XXII.  1  pp.69220D-1-69220D-9,  2008.  Bellingham, Wash..  Society of Photo-optical Instrumentation Engineers
Title of ser.: Proceedings of SPIE - the International Society for Optical Engineering
Ser. no.: 6922