Y. Trouiller ; V. Farys ; A. Borjon ; J. Belledent ; C. Couderc ; F. Sundermann ; J. Urbani ; Y. Rody ; C. Gardin ; J. Planchot ; W. Conley ; P. Goirand ; S. Warrick ; F. Robert ; G. Kerrien ; F. Vautrin ; B. Wilkinson ; M. Saied ; E. Yesilada ; P. Montgomery ; L. L. Cam ; C. Martinelli
Pub. info.:
Optical microlithography XX. 2007. Bellingham, Wash.. SPIE - The International Society of Optical Engineering
Title of ser.:
Proceedings of SPIE - the International Society for Optical Engineering
E. Poortinga ; T. Scheruebl ; W. Conley ; F. Sundermann
Pub. info.:
EMLC 2007 : 23rd european mask and lithography conference : 22-25 January 2007, Grenoble, France. 2007. Bellingham, Wash.. SPIE - The International Society of Optical Engineering
Title of ser.:
Proceedings of SPIE - the International Society for Optical Engineering