1.

Conference Proceedings
Conference Proceedings
1. 0.25-ｦﾌm logic manufacturability using practical 2D optical proximity correction
Kling,M.E. ; Lucas,K.D. ; Reich,A. ; Roman,B.J. ; Chuang,H. ; Gilbert,P.V. ; Grobman,W.D. ; Travis,E.O. ; Tsui,P. ; Vuong,T. ; West,J.P.
Pub. info.: Optical microlithography XI : 25-27 February 1998, Santa Clara, California.  pp.204-214,  1998.  Bellingham, Wash., USA.  SPIE-The International Society for Optical Engineering
Title of ser.: Proceedings of SPIE - the International Society for Optical Engineering
Ser. no.: 3334
2.

Conference Proceedings
Conference Proceedings
2. Plasma antireflective coating optimization using enhanced reflectivity modeling
Lucas,K.D. ; Vasquez,J.A. ; Jain,A. ; Filipiak,S.M. ; Vuong,T. ; King,C.F. ; Roman,B.J.
Pub. info.: Metrology, Inspection, and Process Control for Microlithography XI.  pp.194-204,  1997.  Bellingham, Wash..  SPIE-The International Society for Optical Engineering
Title of ser.: Proceedings of SPIE - the International Society for Optical Engineering
Ser. no.: 3050