1.

Conference Proceedings
Conference Proceedings
1. Effect of Cobalt and Copper Contamination on the Electrical Properties of Processed Silicon
Benton,J. ; Boone,T. ; Jacobson,D. ; Silverman,P. ; Rafferty,C. ; Weinzierl,S. ; Vu,B.
Pub. info.: High Purity Silicon VI : proceedings of the sixth International Symposium.  pp.278-286,  2000.  Pennington, N.J., Bellingham, Wash..  Electrochemical Society — SPIE-The International Society for Optical Engineering
Title of ser.: Proceedings of SPIE - the International Society for Optical Engineering
Ser. no.: 4218
2.

Conference Proceedings
Conference Proceedings
2. Patterned eutectic bonding with Al/Ge thin films for MEMS
Zavracky,P.M. ; Vu,B.
Pub. info.: Micromachining and microfabrication process technology : 23-24 October, 1995, Austin, Texas.  pp.46-52,  1995.  Bellingham, Wash..  SPIE-The International Society for Optical Engineering
Title of ser.: Proceedings of SPIE - the International Society for Optical Engineering
Ser. no.: 2639