1.

Conference Proceedings
Conference Proceedings
1. Properties of (311) planes anisotropically etched in (100) silicon by TMAH
Resnik,D. ; Vrtacnik,D. ; Aljancic,U. ; Mozek,M. ; Amon,S.
Pub. info.: Micromachining and microfabrication process technology VII : 22-24 October 2001, San Francisco, USA.  pp.436-446,  2001.  Bellingham, Wash..  SPIE-The International Society for Optical Engineering
Title of ser.: Proceedings of SPIE - the International Society for Optical Engineering
Ser. no.: 4557
2.

Conference Proceedings
Conference Proceedings
2. Silicon ultraviolet photodiode processing via integrated MOS capacitors
Vrtacnik,D. ; Resnik,D. ; Krizaj,D. ; Amon,S.
Pub. info.: Ultraviolet atmospheric and space remote sensing : methods and instrumentation II : 22 July 1999, Denver, Colorado.  pp.189-197,  1999.  Bellingham, Wash..  SPIE - The International Society for Optical Engineering
Title of ser.: Proceedings of SPIE - the International Society for Optical Engineering
Ser. no.: 3818