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14 results

Conference Proceedings

1. Post-buckled precompressed (PBP) piezoelectric actuators for UAV flight control [6173-15]

Vos, R. ; Barrett, R. ; Krakers, L ; Van Tooren, M.

Pub. info.:	Smart structures and materials 2006 : Smart structures and integrated systems : 27 February-2 March 2006, San Diego, California, USA. pp.61730E-, 2006. Bellingham, Wash.. SPIE - The International Society of Optical Engineering
Title of ser.:	Proceedings of SPIE - the International Society for Optical Engineering
Ser. no.:	6173

Conference Proceedings

2. EVALUATION OF MEGASONIC CLEANING SYSTEMS FOR PARTICLE REMOVAL EFFICIENCY AND DAMAGING

Vereecke, G. ; Holsteyns, F. ; Veltens, J. ; Lux, M. ; Amauts, S. ; Kenis, K. ; Vos, R. ; Mertens, P. ; Heyns, M.

Pub. info.:	Cleaning technology in semiconductor device manufacturing VIII : proceedings of the international symposium. pp.145-152, 2003. Pennington, NJ. Electrochemical Society
Title of ser.:	Electrochemical Society Proceedings Series
Ser. no.:	2003-26

Conference Proceedings

3. MECHANISMS OF PARTICLE REMOVAL DURING BRUSH SCRUBBER CLEANING

Xu, K. ; Vos, R. ; Vereecke, G. ; Mertens, P. ; Heyns, M. ; Vinckier, C. ; Fransaer, J.

Pub. info.:	Cleaning technology in semiconductor device manufacturing VIII : proceedings of the international symposium. pp.137-144, 2003. Pennington, NJ. Electrochemical Society
Title of ser.:	Electrochemical Society Proceedings Series
Ser. no.:	2003-26

Conference Proceedings

4. CORROSION OF ALUMINUM ALLOYS DURING DRYING OF METALLIZED WAFERS

Vos, R. ; Meuris, M. ; Mertens, P. ; Heyns, M. ; Hatcher, Z.

Pub. info.:	Proceedings of the Fifth International Symposium on Cleaning Technology in Semiconductor Device Manufacturing. pp.569-578, 1997. Pennington, NJ. Electrochemical Society
Title of ser.:	Electrochemical Society Proceedings Series
Ser. no.:	97-35

Conference Proceedings

5. INVITED: WAFER CLEANING: A QUANTIFIABLE PROCESS STEP

Mertens, P.W. ; Loewenstein, L. ; Vos, R. ; De Gendt, S. ; Bearda, T. ; Heynes, M.M.

Pub. info.:	Silicon materials science and technology : proceedings of the Eighth International Symposium on Silicon Materials Science and Technology. pp.592-606, 1998. Pennington, NJ. Electrochemical Society
Title of ser.:	Electrochemical Society Proceedings Series
Ser. no.:	98-1(1)

Conference Proceedings

6. Effect of Metal Contamination and Improved Cleaning Strategies

Mertens, P.W. ; Bearda, T. ; Lowewenstein, L.M. ; Martin, A.R. ; Hub, W. ; Kolbesen, B.O. ; Teerlink, I. ; Vos, R. ; Baeyens, M. ; Gendt, S.De ; Kenis, K. ; Heyns, M.M.

Pub. info.:	Proceedings of the Third International Symposium on Defects in Silicon. pp.401-413, 1999. Pennington, NJ. Electrochemical Society
Title of ser.:	Electrochemical Society Proceedings Series
Ser. no.:	99-1

Conference Proceedings

7. QUANTITATIVE MODELING OF H2O2 DECOMPOSITION IN SC1

Mertens, P. ; Baeyens, M. ; Moyaerts, G. ; Okorn-Schmidt, H. ; Vos, R. ; De Waele, R. ; Hatcher, Z. ; Hub, W. ; De Gendt, S. ; Knotter, M. ; Meuris, M. ; Heyns, M.

Pub. info.:	Proceedings of the Fifth International Symposium on Cleaning Technology in Semiconductor Device Manufacturing. pp.176-183, 1997. Pennington, NJ. Electrochemical Society
Title of ser.:	Electrochemical Society Proceedings Series
Ser. no.:	97-35

Conference Proceedings

8. Post-buckled precompressed(PBP) elements: a new class of flight control actuators enhancing high-speed autonomous VTOL MAVs

Barrett, R. ; McMurtry, R. ; Vos, R. ; Tiso, P. ; De Breuker, R.

Pub. info.:	Smart structures and materials 2005 : Industrial and commercial applications of smart structures technologies : 7-10 March 2005, San Diego, California, USA. pp.111-122, 2005. Bellingham, Wash.. SPIE - The International Society of Optical Engineering
Title of ser.:	Proceedings of SPIE - the International Society for Optical Engineering
Ser. no.:	5762

Conference Proceedings

9. ADVANCED SINGLE CHEMISTRY ALKALINE CLEANING IN A SINGLE TANK TOOL

Onsia, B. ; Schellkes, E. ; Vos, R. ; De Gendt, S. ; Doll, O. ; Fester, A. ; Kolbesen, B. ; Hoffman, M. ; Hatcher, Z. ; Wolke, K. ; Mertens, P. ; Heyns, M.

Pub. info.:	Cleaning technology semiconductor device manufacturing : proceedings of the seventh international symposium. pp.23-30, 2001. Pennington, N.J.. Electrochemical Society
Title of ser.:	Electrochemical Society Proceedings Series
Ser. no.:	2001-26

10.

Conference Proceedings

10. OPTIMIZATION OF A BRUSH SCRUBBER FOR NANO-SIZED PARTICLES

Xu, K. ; Vos, R. ; Arnauts, S. ; Lux, M. ; Schaetzlein, W. ; Speh, U. ; Mertens, P. ; Heyns, M. ; Vinckier, C.

Pub. info.:	Cleaning technology semiconductor device manufacturing : proceedings of the seventh international symposium. pp.187-194, 2001. Pennington, N.J.. Electrochemical Society
Title of ser.:	Electrochemical Society Proceedings Series
Ser. no.:	2001-26

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