1.

Conference Proceedings
Conference Proceedings
1. Modeling Analysis of SiC CVD in the Horizontal Hot Wall Reactors
Semennikov, A.K. ; Talalaev, R.A. ; Vorob'ev, A.N. ; Makarov, Yu.N.
Pub. info.: Chemical vapor deposition XVI and EUROCVD 14 : proceedings of the international symposium.  pp.210-217,  2003.  Pennington, NJ.  Electrochemical Society
Title of ser.: Electrochemical Society Proceedings Series
Ser. no.: 2003-8
2.

Conference Proceedings
Conference Proceedings
2. Influence of Silicon Gas-to-Particle Conversion on SiC CVD in a Cold-Wall Rotating-Disc Reactor
Vorob'ev, A.N. ; Bogdanov, M.V. ; Komissarov, A.E. ; Karpov, S.Yu. ; Bord, O.V. ; Lovtsus, A.A. ; Makarov, Yu.N.
Pub. info.: Silicon carbide and related materials : ECSCRM2000, proceedings of the 3rd European Conference on Silicon Carbide and Related Materials, Kloster Banz, Germany, September 2000.  pp.107-110,  2001.  Uetikon-Zuerich, Switzerland.  Trans Tech Publications
Title of ser.: Materials science forum
Ser. no.: 353-356
3.

Conference Proceedings
Conference Proceedings
3. Modeling Analysis of SiC CVD in a Planetary Reactor
Vorob'ev, A.N. ; Semennikov, A.K. ; Zhmakin, A.I. ; Makarov, Yu.N. ; Dauelsberg, M. ; Wischmeyer, F. ; Heuken, M. ; Juergensen, H.
Pub. info.: Silicon carbide and related materials : ECSCRM2000, proceedings of the 3rd European Conference on Silicon Carbide and Related Materials, Kloster Banz, Germany, September 2000.  pp.103-106,  2001.  Uetikon-Zuerich, Switzerland.  Trans Tech Publications
Title of ser.: Materials science forum
Ser. no.: 353-356