1.

Conference Proceedings
Conference Proceedings
1. Critical Issues in Group-III Nitride MOVPE Modeling
Yakovlev, E. ; Talalaev, R. ; Vorob'ev, A. ; Makarov, Y.
Pub. info.: Chemical vapor deposition XVI and EUROCVD 14 : proceedings of the international symposium.  pp.258-265,  2003.  Pennington, NJ.  Electrochemical Society
Title of ser.: Electrochemical Society Proceedings Series
Ser. no.: 2003-8
2.

Conference Proceedings
Conference Proceedings
2. Modeling Analysis of Gas-Phase Generated Silicon Clusters in a Rotating Disk CVD Reactor
Vorob'ev, A. ; Makarov, N.Y. ; Karpov, S.U.
Pub. info.: Fundamental gas-phase and surface chemistry of vapor-phase deposition II and process control, diagnostics, and modeling in semiconductor manufacturing IV : proceedings of the international symposium.  pp.462-467,  2001.  Pennington, N.J..  Electrochemical Society
Title of ser.: Electrochemical Society Proceedings Series
Ser. no.: 2001-13