1.

Conference Proceedings
Conference Proceedings
1. N-Channel MOS Transistors Below 0.5 ｦﾌm with Ultra-Shallow Channels Formed by Low Temperature Selective Silicon Epitaxy
Huang, P. L. ; Seastrand, K. ; Violette, K. E. ; Wolf, J. ; Ozturk, M. C.
Pub. info.: Rapid thermal and integrated processing IV : symposium held April 17-20, 1995, San Francisco, California, U.S.A..  pp.347-,  1995.  Pittsburgh, PA.  MRS - Materials Research Society
Title of ser.: Materials Research Society symposium proceedings
Ser. no.: 387
2.

Conference Proceedings
Conference Proceedings
2. Sub-Half Micron Elevated Source/Drain NMOSFETS by Low Temperature Selective Epitaxial Deposition
Sun, J. ; Bartholomew, R. F. ; Bellur, K. ; O'Neil, P. A. ; Srivastava, A. ; Violette, K. E. ; Ozturk, M. C. ; Osburn, C. M. ; Masnari, N. A.
Pub. info.: Rapid thermal and integrated processing V : symposium held April 8-12, 1996, San Francisco, California, U.S.A..  pp.343-,  1996.  Pittsburgh, PA.  MRS - Materials Research Society
Title of ser.: Materials Research Society symposium proceedings
Ser. no.: 429
3.

Conference Proceedings
Conference Proceedings
3. IN-SITU DOPED MULTI-LAYER EPITAXIAL STRUCTURES WITH ABRUPT DOPING TRANSITIONS BY ULTRA HIGH VACUUM RAPID THERMAL CHEMICAL VAPOR DEPOSITION (UHV-RTCVD)
Ozturk, M. C. ; Celik, S. M. ; Ban, I. ; Harris, G. ; Sanganeria, M. K. ; Violette, K. E. ; Lee, A.
Pub. info.: Rapid thermal and integrated processing III : symposium held April 4-7, 1994, San Francisco, California, U.S.A..  pp.43-,  1994.  Pittsburgh, PA.  MRS - Materials Research Society
Title of ser.: Materials Research Society symposium proceedings
Ser. no.: 342
4.

Conference Proceedings
Conference Proceedings
4. Ultra-Shallow Raised p+n Junctions with Self-Aligned Titanium Silicide Contacts Formed by Boron Outdiffusion from Selectively Deposited Silicon Epitaxial Layers
Shih, H. T. ; Violette, K. E. ; Ozturk, M. C.
Pub. info.: Rapid thermal and integrated processing IV : symposium held April 17-20, 1995, San Francisco, California, U.S.A..  pp.401-,  1995.  Pittsburgh, PA.  MRS - Materials Research Society
Title of ser.: Materials Research Society symposium proceedings
Ser. no.: 387