1.

Conference Proceedings
Conference Proceedings
1. OPC on real-world circuitry
O'Brien, S.C. ; Aton, T. ; Mason, M.E. ; Vickery, C. ; Randall, J.N.
Pub. info.: Design and process integration for microelectronic manufacturing II : 26-28 February 2003, Santa Clara, California, USA.  pp.107-115,  2003.  Bellingham, Wash..  SPIE-The International Society for Optical Engineering
Title of ser.: Proceedings of SPIE - the International Society for Optical Engineering
Ser. no.: 5042
2.

Conference Proceedings
Conference Proceedings
2. Investigation of smart inspection of critical layer reticles using additional designer data to determine defect significance
Volk, W.W. ; Hess, C. ; Ruch, W. ; Yu, Z. ; Ma, W. ; Fisher, L. ; Vickery, C. ; Ma, Z.M.
Pub. info.: 23rd Annual BACUS Symposium on Photomask Technology.  pp.489-499,  2003.  Bellingham, Wash..  SPIE - The International Society of Optical Engineering
Title of ser.: Proceedings of SPIE - the International Society for Optical Engineering
Ser. no.: 5256