Venturini, J. ; Hernandez, M ; Sarnet, T. ; Kerrien, G. ; Laviron, C. ; Santailler, J.L. ; Boulmer, J.
Pub. info.:
Advanced short-time thermal processing for Si-based CMOS devices : proceedings of the international symposium. pp.131-136, 2003. Pennington, NJ. Electrochemical Society
Silicon front-end junction formation : physics and technology : symposium held April 13-15, 2004, San Francisco, California, U.S.A.. pp.189-194, 2004. Warrendale, Pa.. Materials Research Society
Venturini, J. ; Hernandez, M. ; Zahorski, D. ; Kerrien, G. ; Sarnet, T. ; Debarre, D. ; Boulmer, J. ; Laviron, C. ; Semeria, M. -N. ; Camel, D. ; Santailler, J. -L.
Pub. info.:
CMOS front-end materials and process technology : symposium held April 22-24, 2003, San Francisco, California, U.S.A.. pp.255-260, 2003. Warrendale, Pa.. Materials Research Society
Sarnet, T. ; Kerrien, G. ; Yaakoubi, N. ; Bosseboeuf, A. ; Dufour-Gergam, E. ; Debarre, D. ; Boulmer, J. ; Kakushima, K. ; Laviron, C. ; Hernandez, M. ; Venturini, J. ; Bourouina, T.
Pub. info.:
High-Power Laser Ablation V. pp.669-680, 2004. Bellingham, Wash.. SPIE - The International Society of Optical Engineering
Title of ser.:
Proceedings of SPIE - the International Society for Optical Engineering