1.

Conference Proceedings
Conference Proceedings
1. TEMPERATURE DEPENDENCE OF ETCH RATE AND RESIDUAL DAMAGE IN REACTIVELY ION ETCHED GaAs AND A1GaAs
Pearton, S.J. ; Jones, K.S. ; Chakabarti, U.K. ; Emerson, B. ; Lane, E. ; Vasile, M.J. ; Fullowan, T.R. ; Hobson, W.S. ; Short, K.T. ; Haegel, N.M.
Pub. info.: Laser and particle-beam chemical processes on surfaces : symposium held November 29-December 2, 1988, Boston, Massachusetts, U.S.A..  pp.489-494,  1989.  Pittsburgh, Pa..  Materials Research Society
Title of ser.: Materials Research Society symposium proceedings
Ser. no.: 129
2.

Conference Proceedings
Conference Proceedings
2. Micrometer-Scale Machining of Metals and Polymers Enabled by Focused Ion Beam Sputtering
Adams, D.P. ; Benavides, G.L. ; Vasile, M.J.
Pub. info.: Materials science of microelectromechanical systems (MEMS) devices : symposium held December 1-2, 1998, Boston, Massachusetts, U.S.A..  pp.201-206,  1999.  Warrendale, Pa..  Materials Research Society
Title of ser.: Materials Research Society symposium proceedings
Ser. no.: 546
3.

Conference Proceedings
Conference Proceedings
3. A Direct Molding Technique to Fabricate Silica Micro-Optical Components
Lee, C-K.T. ; Vasile, M.J. ; Goettert, J.
Pub. info.: Materials science of microelectromechanical systems (MEMS) devices : symposium held December 1-2, 1998, Boston, Massachusetts, U.S.A..  pp.189-194,  1999.  Warrendale, Pa..  Materials Research Society
Title of ser.: Materials Research Society symposium proceedings
Ser. no.: 546