1.

Conference Proceedings
Conference Proceedings
1. FLOATING TEMPERATURE DEPOSITION OF DEVICE QUALITY SiO2 THIN FILM BY DECR PLASMA
Agius, B. ; Hugon, M.C. ; Jiang, N. ; Varniere, F. ; Plais, F. ; Pribat, D. ; Froment, M. ; Puech, M.
Pub. info.: Amorphous insulating thin films : symposium held December 1-4, 1992, Boston, Massachusetts, U.S.A..  pp.181-186,  1993.  Pittsburgh, Pa..  Materials Research Society
Title of ser.: Materials Research Society symposium proceedings
Ser. no.: 284
2.

Conference Proceedings
Conference Proceedings
2. Correlation between Insitu Optical Emission Spectrocopy of a O2/Ar Reactive Plasma and Composition of PZT Thin Film Deposited from Metallio Target by RF Magnetron Sputtering
Ayguavives, F. ; Aubert, P. ; Eakim, B. ; Machu, A. ; Varniere, F. ; Agius, B.
Pub. info.: Proceedings of the International Symposium on Thin Film Materials, Processes, Reliability, and Applications, Thin Film Processes.  pp.299-308,  1997.  Pennington, NJ.  Electrochemical Society
Title of ser.: Electrochemical Society Proceedings Series
Ser. no.: 97-30
3.

Conference Proceedings
Conference Proceedings
3. Optical and Electrical Characterizations of PZT Films with Different O/Pb Stoichiometry
Hugon, M. C. ; Kim, B. Ea ; Varniere, F. ; Agius, B. ; Masetti, E.
Pub. info.: Ferroelectric thin films V : symposium held April 7-12, 1996, San Francisco, California, U.S.A..  pp.407-,  1996.  Pittsburgh, Pa..  MRS - Materials Research Society
Title of ser.: Materials Research Society symposium proceedings
Ser. no.: 433
4.

Conference Proceedings
Conference Proceedings
4. PHYSICOCHEMICAL AND MICROSTRUCTURAL CHARACTERIZATION OF RF SPUTTERING MAGNETRON Pb(Zr,Ti)O3 THIN FILMS
Varniere, F. ; Cattan, E. ; Eakim, B. ; Achard, H. ; Agius, B.
Pub. info.: Ferroelectric thin films III : symposium held April 13-16, 1993, San Francisco, California, U.S.A..  pp.23-,  1992.  Pittsburgh, Pa..  MRS - Materials Research Society
Title of ser.: Materials Research Society symposium proceedings
Ser. no.: 310
5.

Conference Proceedings
Conference Proceedings
5. Effect of Electrodes on Crystallization and Electrical Properties of Ferroelectric PZT Films Deposited by RF Magnetron Sputtering
Ea-Kim, B. ; Varniere, F. ; Hugon, M. C. ; Agius, B. ; Bisaro, R. ; Olivier, J.
Pub. info.: Ferroelectric thin films V : symposium held April 7-12, 1996, San Francisco, California, U.S.A..  pp.163-,  1996.  Pittsburgh, Pa..  MRS - Materials Research Society
Title of ser.: Materials Research Society symposium proceedings
Ser. no.: 433