A collection of technical papers : AIAA/ICAS international air and space symposium and exposition: the next 100 years, Dayton, Ohio, 14-17 July 2003. v. 3 pp.1841-1848, 2003. Reston, Va. American Institute of Aeronautics and Astronautics
Title of ser.:
AIAA Paper : AIAA/ICAS International Air and Space Symposium and Exposition
DellaGuardia, R. ; Kwong, R.W. ; Li, W. ; Lawson, P. ; Burkhardt, M. ; Grauer, I.C. ; Wu, Q. ; Angyal, M. ; Hichri, H. ; Melville, I. ; Kumar, K. ; Lin, Y. ; Holmes, S.J. ; Varanasi, R. ; Spooner, T. ; McHerron, D.
Pub. info.:
Optical Microlithography XVII. pp.980-987, 2004. Bellingham, Wash.. SPIE - The International Society of Optical Engineering
Title of ser.:
Proceedings of SPIE - the International Society for Optical Engineering