1.

Conference Proceedings
Conference Proceedings
1. Long-term 193-nm laser irradiation of thin-film-coated CaF2 in the presence of H2O
V. Liberman ; M. Switkes ; M. Rothschild ; S.T. Palmacci ; J.H.C. Sedlacek ; D.E. Hardy ; A. Grenville
Pub. info.: Optical microlithography XVIII : 1-4 March, 2005, San Jose, California, USA.  pp.646-654,  2005.  Bellingham, Wash..  SPIE - The International Society of Optical Engineering
Title of ser.: Proceedings of SPIE - the International Society for Optical Engineering
Ser. no.: 5754
2.

Conference Proceedings
Conference Proceedings
2. Laser durability studies of high index immersion fluids: fluid degradation and optics contamination effects
V. Liberman ; M. Rothschild ; S. T. Palmacci ; P. A. Zimmerman ; A. Grenville
Pub. info.: Optical microlithography XX.  2007.  Bellingham, Wash..  SPIE - The International Society of Optical Engineering
Title of ser.: Proceedings of SPIE - the International Society for Optical Engineering
Ser. no.: 6520
3.

Conference Proceedings
Conference Proceedings
3. High-index immersion lithography with second-generation immersion fluids to enable numerical aperatures of 1.55 for cost effective 32-nm half pitches
R. H. French ; V. Liberman ; H. V. Tran ; J. Feldman ; D. J. Adelman ; R. C. Wheland ; W. Qiu ; S. J. McLain ; O. Nagao ; M. Kaku ; M. Mocella ; M. K. Yang ; M. F. Lemon ; L. Brubaker ; A. L. Shoe ; B. Fones ; B. E. Fischel ; K. Krohn ; D. Hardy ; C. Y. Chen
Pub. info.: Optical microlithography XX.  2007.  Bellingham, Wash..  SPIE - The International Society of Optical Engineering
Title of ser.: Proceedings of SPIE - the International Society for Optical Engineering
Ser. no.: 6520
4.

Conference Proceedings
Conference Proceedings
4. High-index immersion lithography: preventing lens photocontamination and identifying optical behavior of LuAG
V. Liberman ; M. Rothschild ; S. T. Palmacci ; R. Bristol ; J. Byers
Pub. info.: Optical Microlithography XXI.  1  pp.692416-1-692416-11,  2008.  Bellingham, Wash..  Society of Photo-optical Instrumentation Engineers
Title of ser.: Proceedings of SPIE - the International Society for Optical Engineering
Ser. no.: 6924