1.

Conference Proceedings
Conference Proceedings
1. Plasma Enhanced CVD and Plasma Chemical Etching at Atmospheric Pressure for Continuous Processing of Crystalline Silicon Solar Wafers
E. Lopez ; B. Dresler ; G. Mäder ; I. Dani ; V. Hopfe ; S. Kaskel ; M. Heintze ; R. Möller ; H. Wanka ; M. Kirschmann ; J. Frenck ; A. Poruba ; R. Barinka ; R. Dahl ; H. Nussbaumer
Pub. info.: 51st annual technical conference proceedings, April 19-24, 2008, Chicagom, IL.  pp.622-626,  2008.  Albuquerque, NM.  Society of Vacuum Coaters
Title of ser.: Annual Technical Conference of Society of Vacuum Coaters
Ser. no.: 51
2.

Conference Proceedings
Conference Proceedings
2. Atmospheric Pressure Plasmas for Crystalline Silicon Photovoltaics
V. Hopfe ; D.W. Sheel ; R. Moeller
Pub. info.: 51st annual technical conference proceedings, April 19-24, 2008, Chicagom, IL.  pp.123-133,  2008.  Albuquerque, NM.  Society of Vacuum Coaters
Title of ser.: Annual Technical Conference of Society of Vacuum Coaters
Ser. no.: 51