Fabrication of programmed phase defects on EUV multilayer blanks
- Author(s):
Kinoshita, T. ( HOYA Corp. (Japan) ) Shoki, T. ( HOYA Corp. (Japan) ) Kobayashi, H. ( HOYA Corp. (Japan) ) Ohkubo, R. ( HOYA Corp. (Japan) ) Usui, Y.-I. ( HOYA Corp. (Japan) ) Hosoya, M. ( HOYA Corp. (Japan) ) Sakaya, N. ( HOYA Corp. (Japan) ) Nagarekawa, O. ( HOYA Corp. (Japan) ) - Publication title:
- 23rd Annual BACUS Symposium on Photomask Technology
- Title of ser.:
- Proceedings of SPIE - the International Society for Optical Engineering
- Ser. no.:
- 5256
- Pub. Year:
- 2003
- Page(from):
- 595
- Page(to):
- 606
- Pages:
- 12
- Pub. info.:
- Bellingham, Wash.: SPIE - The International Society of Optical Engineering
- ISSN:
- 0277786X
- ISBN:
- 9780819451439 [0819451436]
- Language:
- English
- Call no.:
- P63600/5256.1
- Type:
- Conference Proceedings
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