1.

Conference Proceedings
Conference Proceedings
1. INVITED: EVALUATION OF MICROSCOPIC LEAKAGE CURRENT INDUCED BY BULK MICRO DEFECTS
Ushiku, Y. ; Ihnuma, T. ; Iwase, M. ; Fujimore, H.
Pub. info.: Silicon materials science and technology : proceedings of the Eighth International Symposium on Silicon Materials Science and Technology.  pp.1549-1563,  1998.  Pennington, NJ.  Electrochemical Society
Title of ser.: Electrochemical Society Proceedings Series
Ser. no.: 98-1(2)
2.

Conference Proceedings
Conference Proceedings
2. Experimental Study of Degradation of Mechanical Strength of Silicon Wafer Caused by LSI processes
Yagishita, A. ; Fujii, O. ; Numano, M. ; Kawamura, N. ; Iwase, M. ; Ushiku, Y. ; Arikado, T.
Pub. info.: Proceedings of the Electrochemical Society Symposium on Diagnostic Techniques for Semiconductor Materials and Devices.  pp.441-451,  1997.  Pennington, NJ.  Electrochemical Society
Title of ser.: Electrochemical Society Proceedings Series
Ser. no.: 97-12
3.

Conference Proceedings
Conference Proceedings
3. THE INTERRELATION BETWEEN THE MORPHOLOGY OF THE OXYGEN PRECIPITATES AND THE JUNCTION LEAKAGE CURRENT IN CZOCHRALSKI SILICON CRYSTALS
Fujimori, H. ; Ushiku, Y. ; Ihnuma, T. ; Kirino, Y. ; Matsushita, Y.
Pub. info.: Silicon materials science and technology : proceedings of the Eighth International Symposium on Silicon Materials Science and Technology.  pp.1033-1044,  1998.  Pennington, NJ.  Electrochemical Society
Title of ser.: Electrochemical Society Proceedings Series
Ser. no.: 98-1(2)