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15 results

Conference Proceedings

1. Multilayer coating and tests of a 10｡ﾟ extreme-ultraviolet lithographic camera

Spiller,E.A. ; Weber,F.J. ; Montcalm,C. ; Baker,S.L. ; Gullikson,E.M. ; Underwood,J.H.

Pub. info.:	Emerging lithographic technologies II : 23-25 February 1998, Santa Clara, California. pp.62-71, 1998. Bellingham, Wash., USA. SPIE-The International Society for Optical Engineering
Title of ser.:	Proceedings of SPIE - the International Society for Optical Engineering
Ser. no.:	3331

Conference Proceedings

2. Beamline for measurement and characterization of multilayer optics for EUV lithography

Underwood,J.H. ; Gullikson,E.M.

Pub. info.:	Emerging lithographic technologies II : 23-25 February 1998, Santa Clara, California. pp.52-61, 1998. Bellingham, Wash., USA. SPIE-The International Society for Optical Engineering
Title of ser.:	Proceedings of SPIE - the International Society for Optical Engineering
Ser. no.:	3331

Conference Proceedings

3. Mass-producible microholographic tags

Sweatt,W.C. ; Descour,M.R. ; Ray-Chaudhuri,A.K. ; Kravitz,S.H. ; Warren,M.E. ; Stulen,R.H. ; Tichenor,D.A. ; Underwood,J.H. ; Krenz,K.D.

Pub. info.:	Diffractive and holographic optics technology III : 1-2 February, 1996, San Jose, California. pp.170-174, 1996. Bellingham, Wash., USA. SPIE-The International Society for Optical Engineering
Title of ser.:	Proceedings of SPIE - the International Society for Optical Engineering
Ser. no.:	2689

Conference Proceedings

4. Elastic bending and water cooling strategies for producing high-quality synchrotron radiation mirrors in silicon (Invited Paper)

Underwood,J.H. ; Batson,P.J. ; Beguiristain,R. ; Gullikson,E.M.

Pub. info.:	Materials, manufacturing, and measurement for synchrotron radiation mirrors : 30-31 July 1997, San Diego, California. pp.88-95, 1997. Bellingham, Wash., USA. SPIE-The International Society for Optical Engineering
Title of ser.:	Proceedings of SPIE - the International Society for Optical Engineering
Ser. no.:	3152

Conference Proceedings

5. Beamline for metrology of x-ray/EUV optics at the Advances Light Source (Invited Paper)

Underwood,J.H. ; Gullikson,E.M. ; Koike,M. ; Batson,P.J.

Pub. info.:	Grazing incidence and multilayer X-ray optical systems : 27-29 July 1997, San Diego, California. pp.214-221, 1997. Bellingham, Wash.. SPIE-The International Society for Optical Engineering
Title of ser.:	Proceedings of SPIE - the International Society for Optical Engineering
Ser. no.:	3113

Conference Proceedings

6. Nonspecular scattering from multilayer mirrors at normal incidence

Gullikson,E.M. ; Stearns,D.G. ; Gaines,D.P. ; Underwood,J.H.

Pub. info.:	Grazing incidence and multilayer X-ray optical systems : 27-29 July 1997, San Diego, California. pp.412-419, 1997. Bellingham, Wash.. SPIE-The International Society for Optical Engineering
Title of ser.:	Proceedings of SPIE - the International Society for Optical Engineering
Ser. no.:	3113

Conference Proceedings

7. Laser-produced plasma-based reflectometer for EUV metrology

Mrowka,S. ; Underwood,J.H. ; Gullikson,E.M. ; Batson,P.J.

Pub. info.:	Emerging lithographic technologies IV : 28 February-1 March 2000, Santa Clara, USA. pp.819-822, 2000. Bellingham, Wash.. SPIE - The International Society for Optical Engineering
Title of ser.:	Proceedings of SPIE - the International Society for Optical Engineering
Ser. no.:	3997

Conference Proceedings

8. EUV scattering and flare of 10X projection cameras

Gullikson,E.M. ; Baker,S.L. ; Bjorkholm,J.E. ; Bokor,J. ; Coldberg,K.A. ; Goldsmith,J.E.M. ; Montcalm,C. ; Naulleau,P. ; Spiller,E.A. ; Stearns,D.G. ; Taylor,J.S. ; Underwood,J.H.

Pub. info.:	Emerging lithographic technologies III : 15-17 March 1999, Santa Clara, California. Part2 pp.717-723, 1999. Bellingham, Wash.. SPIE - The International Society for Optical Engineering
Title of ser.:	Proceedings of SPIE - the International Society for Optical Engineering
Ser. no.:	3676

Conference Proceedings

9. Actinic EUVL mask blank defect inspection system

Jeong,S. ; Johnson,L.E. ; Lin,Y. ; Rekawa,S. ; Yan,P. ; Kearney,P.A. ; Tejnil,E. ; Underwood,J.H. ; Bokor,J.

Pub. info.:	Emerging lithographic technologies III : 15-17 March 1999, Santa Clara, California. Part1 pp.298-308, 1999. Bellingham, Wash.. SPIE - The International Society for Optical Engineering
Title of ser.:	Proceedings of SPIE - the International Society for Optical Engineering
Ser. no.:	3676

10.

Conference Proceedings

10. High-precision reflectometry of multilayer coatings for extreme ultraviolet lithography

Wedowski,M. ; Underwood,J.H. ; Gullikson,E.M. ; Bajt,S. ; Folta,J.A. ; Kearney,P.A. ; Montcalm,C. ; Spiller,E.A.

Pub. info.:	Emerging lithographic technologies IV : 28 February-1 March 2000, Santa Clara, USA. pp.83-93, 2000. Bellingham, Wash.. SPIE - The International Society for Optical Engineering
Title of ser.:	Proceedings of SPIE - the International Society for Optical Engineering
Ser. no.:	3997

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