Blank Cover Image

A Study on the Formation and Characteristics of a-Fluoronated Carbon Films by CF4/CH4-JCPCVD

Author(s):
  • Kang, M.S. ( (Cheju National University) )
  • Oh, K.S. ( (Cheju National University) )
  • Choi, C.K. ( (Cheju National University) )
  • Um, S.H. ( (Korea Advanced Institute of Science and Technology) )
  • Chang, H.Y. ( (Korea Advanced Institute of Science and Technology) )
Publication title:
Low and high dielectric constant materials : materials science, processing, and reliability issues : proceedings of the fifth international symposium
Title of ser.:
Electrochemical Society Proceedings Series
Ser. no.:
2000-5
Pub. Year:
2000
Page(from):
90
Page(to):
102
Pages:
13
Pub. info.:
Pennington, N.J.: Electrochemical Society
ISSN:
01616374
ISBN:
9781566772709 [1566772702]
Language:
English
Call no.:
E23400/2000-5
Type:
Conference Proceedings

Similar Items:

1 Conference Proceedings Microactuators Driven by Giant Magnetostrictive Thin Films

Lim, S.H., Choi, Y.S., Han, S.H., Kim, H.J., Moon, S., Kang, H.K., Oh, M.H., Ahn, C.H.

Electrochemical Society
7 Conference Proceedings Formation and Properties of Co-Suicide by Using Col-x Tax Alloy

Kim, M.-J., Lee, D.-H., Ko, D.-H., Ku, J.-H., Choi, S., Fujihara, K., Kang, H.-K., Oh, S-H., Park, C.-G., Lee, H.-J.

Electrochemical Society
2 Conference Proceedings EFFECTS OF TEMPERATURE AND ELECTRICAL STRESS ON THE CHARACTERISTICS OF AMORPHOUS SILICON THIN-FILM TRANSISTORS

Park, J.S., Oh, C.H., Choi, H.S., Han, M.K., Choi, Y.I., Han, C.H.

Materials Research Society
8 Conference Proceedings Properties of Nano-Hybrid Sol-Gel Coating Films Synthesized with Colloidal Silica and Organoalkoxy Silanes

M.K. Na, H.Y. Park, D.P. Kang, M.S. Ahn

Trans Tech Publications
3 Conference Proceedings Electronic defect characteristics of pentacene organic thin films deposited on SiO2/Si substrates

Yang,Y.S., Kim,S.H., Lee,J.-I., Chu,H.Y., Do,L.-M., Lee,H., Oh,J., Lee,J.H., Zyung,T., Ryu,M.K., Jang,M.S.

SPIE-The International Society for Optical Engineering
9 Conference Proceedings Adhesion Properties of PMSSQ-Based Low Dielectric Constant Films by Modified Edge Lift-Off Test

Kim, Y.D., Sin, D.S., Moon, M.S., Kang, J.W., Nam, H.Y., Choi, B.K., Kang, K.K., Ko, M.J.

Electrochemical Society
4 Conference Proceedings A study on Low Dielectric Material Deposition Using a Helicon Plasma Source

Choi, C-K., Oh, Y.J., Lee, K-M, Kim, J-H., Chang, H-Y., Kang, S-W.

Electrochemical Society
10 Conference Proceedings A Numerical Study on Nonequilibrium Heat Transfer and Crater Formation in Thin Metal Films Irradiated by Femtosecond Pulse Laser

H.S. Sim, K.G. Kang, S.H. Lee, J.M. Kim, Y.E. Shin

Trans Tech Publications
5 Conference Proceedings Optical switch driven by giant magnetostrictive thin films

Moon,S.W., Lim,S.H., Lee,S.B., Kang,H.K., Kim,M.C., Han,S.H., Oh,M.H.

SPIE - The International Society for Optical Engineering
11 Conference Proceedings Characteristics and prevention of pattern collapse in EUV lithography

W. Chang, E. Kim, Y. Kang, S. Park, C. Lim, K. Won, J. Kim, H. Oh

SPIE - The International Society of Optical Engineering
6 Conference Proceedings Effects of As Doping on Properties of ZnO Films

Huh, K.S., Hwang, D.K., Bang, K.H., Hong, M.K., Lee, D.H., Myoung, J.M., Oh, M.S., Choi, W.K.

Materials Research Society
12 Conference Proceedings Mechanical Characteristics of Mg and its Composites Recycled from Mg Chips

Chang, S.-Y., Kim, J.-C., Ryu, S.K., Oh, S.-T., Kang, K.M.

Trans Tech Publications
1
 
2
 
3
 
4
 
5
 
6
 
7
 
8
 
9
 
10
 
11
 
12