Epitaxial GaN Layer Growth Using Nitrogen Enriched TiN Buffer Layers

Epitaxial GaN Layer Growth Using Nitrogen Enriched TiN Buffer Layers

Author(s):

Ito, Kazuhiro

Publication title:

Solid-state lighting materials and devices : symposium held April 18-19, 2006, San Francisco, California, U.S.A.

Title of ser.:

Materials Research Society symposium proceedings

Ser. no.:

916

Pub. Year:

2006

Page(from):

71

Page(to):

76

Pages:

6

Pub. info.:

Warrendale, Pa.: Materials Research Society

ISSN:

02729172

ISBN:

9781558998721 [1558998721]

Language:

English

Call no.:

M23500/916

Type:

Conference Proceedings

Details

TDL ID:	ZA00015796
Series ID:	PA00000011
Conf. info. (Name):	Symposium on solid-state lighting materials and devices
Conf. info. (Number):	2006
Conf. info. (Venue):	San Francisco, CA, USA
Conf. info. (Date):	2006.04.18-2006.04.19

Similar Items:

1 Conference Proceedings Effect of Reducing Thickness of TiN Buffer Layers on Epitaxial Growth of GaN Layes K. Ito, Y. Uchida, S.J. Lee, S. Tsukimoto, Y. Ikemoto, K. Hirata, T. Uemura, M. Murakami Trans Tech Publications	7 Conference Proceedings New Buffer Layer Technique Using Underlying Epitaxial AlN Films for High-Quality GaN Growth Shibata, Tomohiko, Kida, Yoshihiro, Miyake, Hideto, Hiramatsu, Kazumasa, Asai, Keiichiro, Nagai, Teruyo, Sumiya, … Materials Research Society
2 Conference Proceedings Simultaneous Formation of Ohmic Contacts for Both N- and P-Type 4H-SiC Using NiAl-Based Contact Materials Susumu Tsukimoto, Toshitake Onishi, Kazuhiro Ito, Masanori Murakami Materials Research Society	8 Conference Proceedings Growth of High Quality Ge Epitaxial Layer on Si(100) Substrate Using Ultra Thin Si0.5Ge0.5 Buffer Nakatsuru, Junko, Date, Hiroki, Mashiro, Supika, Ikemoto, Manabu Materials Research Society
3 Conference Proceedings Simultaneous Formation of n- and p-Type Ohmic Contacts to 4H-SiC Using the Binary Ni/Al System Kazuhiro Ito, Toshitake Onishi, Hidehisa Takeda, Susumu Tsukimoto, Mitsuru Konno, Yuya Suzuki, Masanori Murakami Materials Research Society	9 Conference Proceedings Epitaxial Growth and Magnetic Behavior of (Ni,Zn)Fe2O4 Thin Films on Si Substrate Using Designed Buffer Layers for Novel Memory Application Wakiya, Naoki, Shinozaki, Kazuo, Mizutani, Nobuyasu Materials Research Society
4 Conference Proceedings Rutherford Backscattering Spectrometry Analysis of Growth Rate and Activation Energy for Self-formed Ti-rich Interface Layers in Cu(Ti)/Low-k Samples Kazuyuki Kohama, Kazuhiro Ito, Kenichi Mori, Kazuyoshi Maekawa, Yasuharu Shirai, Masanori Murakami Materials Research Society	10 Conference Proceedings Epitaxial Growth of SiC on Sapphire Substrates With an AIN Buffer Layer Edgar, J.H., Sywe, B.S., Yu, Z.J., Burckhard, S.R., Chaudhuri, J. Electrochemical Society
5 Conference Proceedings Ge Selective Epitaxial Growth with Ultra Thin SiGe Buffer Layer J. Nakatsuru, H. Date, S. Mashiro, M. Ikemoto Electrochemical Society	11 Conference Proceedings THERMAL STRESS IN PARTIALLY SEPARATED GaAs LAYERS GROWN EPITAXIALLY ON Si SUBSTRATES Wada, Naoki, Sakai, Shiro, Ueta, Yoshihiro, Kawasaki, Koji Materials Research Society
6 Conference Proceedings GaN Epitaxial Growth on Sapphire Substrate with Al Buffer Layer Prepared by E-Beam Evaporation H.H. Hwang, J.K. Kim, J.M. Choi, W.J. Lee, I.S. Kim Trans Tech Publications	12 Conference Proceedings Growth of Epitaxial GaN Films Using ZnO Buffer Layer by Pulsed Laser Deposition Huang, T. F., Tuncel, E., Yeo, J. S., Harris, J. S., Jr. MRS - Materials Research Society

1

2

3

4

5

6

7

8

9

10

11

12