Proceedings of the Second International Symposium on Semiconductor Wafer Bonding--Science, Technology, and Applications. pp.395-409, 1993. Pennington, NJ. Electrochemical Society
M. Reiche ; C. Himcinschi ; U. Gösele ; S. Christiansen ; S. Mantl ; D. Buca ; Q. Zhao ; S. Feste ; R. Loo ; D. Nguyen ; W. Buchholtz ; A. Wei ; M. Horstmann ; D. Feijoo ; P. Storck
Pub. info.:
Silicon-on-insulator technology and devices 13. pp.339-344, 2007. Pennington, N.J.. Electrochemical Society