Popov, V.P. ; Tyschenko, I.E. ; Kachurin, G.A. ; Janovskaja, S.G. ; Obodnikov, V.I.
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Proceedings of the Symposium on Crystalline Defects and Contamination, their Impact and Control in Device Manufacturing II. pp.309-317, 1997. Pennington, NJ. Electrochemical Society
Tyschenko, I.E. ; Talochkin, A.B. ; Cherkov, A.G. ; Zhuravlev, K.S. ; Misiuk, A. ; Yankov, R.A. ; Skorupa, W.
Pub. info.:
Solid State Crystals 2002: Crystalline Materials for Optoelectronics. pp.236-242, 2003. Bellingham, Wash.. SPIE-The International Society for Optical Engineering
Title of ser.:
Proceedings of SPIE - the International Society for Optical Engineering