Nauka, K. ; Amano, J. ; Scott, M.P. ; Weber, E.R. ; Turner, J.E. ; Tsai, R.
Pub. info.:
Materials issues in silicon integrated circuit processing : symposium held April 15-18, 1986, Palo Alto, California, U.S.A.. pp.319-324, 1986. Pittsburgh, Pa.. Materials Research Society
Turner, J.E. ; Miyazaki, K. ; Fukazawa, Y. ; Muraoka, H.
Pub. info.:
ULSI science and technology, 1995 : proceedings of the Fifth International Symposium on Ultra Large Scale Integration Science and Technology. pp.384-397, 1995. Pennington, NJ. Electrochemical Society