1.

Conference Proceedings

Conference Proceedings
Jablonski, J. ; Miyamura, Y. ; Imai, M. ; Tsuya, H.
Pub. info.: Proceedings of the Sixth International Symposium on Silicon-on-Insulator Technology and Devices.  pp.28-37,  1994.  Pennington, NJ.  Electrochemical Society
Title of ser.: Electrochemical Society Proceedings Series
Ser. no.: 1994-11
2.

Conference Proceedings

Conference Proceedings
Hourai, M. ; Asayama, E. ; Onno, T. ; Sano, M. ; Tsuya, H.
Pub. info.: Proceedings of the Fourth International Symposium on High Purity Silicon.  pp.214-225,  1996.  Pennington, NJ.  Electrochemical Society
Title of ser.: Electrochemical Society Proceedings Series
Ser. no.: 96-13
3.

Conference Proceedings

Conference Proceedings
Sano, M. ; Ohgushi, S. ; Sadamitsu, S. ; Tsuya, H.
Pub. info.: Proceedings of the Symposium on Crystalline Defects and Contamination, their Impact and Control in Device Manufacturing II.  pp.281-294,  1997.  Pennington, NJ.  Electrochemical Society
Title of ser.: Electrochemical Society Proceedings Series
Ser. no.: 97-22
4.

Conference Proceedings

Conference Proceedings
Ono, T. ; Hone, H. ; Miyazaki, M. ; Tsuya, H. ; Rozgonyi, G.A.
Pub. info.: Proceedings of the Third International Symposium on Defects in Silicon.  pp.300-312,  1999.  Pennington, NJ.  Electrochemical Society
Title of ser.: Electrochemical Society Proceedings Series
Ser. no.: 99-1
5.

Conference Proceedings

Conference Proceedings
Kitamura, T. ; Tamura, F. ; Hara, T. ; Hourai, M. ; Tsuya, H.
Pub. info.: Proceedings of the Fourth International Symposium on High Purity Silicon.  pp.533-543,  1996.  Pennington, NJ.  Electrochemical Society
Title of ser.: Electrochemical Society Proceedings Series
Ser. no.: 96-13
6.

Conference Proceedings

Conference Proceedings
Asayama, E. ; Ono, T. ; Takeshita, M. ; Hourai, M. ; Sano, M. ; Tsuya, H.
Pub. info.: Silicon materials science and technology : proceedings of the Eighth International Symposium on Silicon Materials Science and Technology.  pp.546-556,  1998.  Pennington, NJ.  Electrochemical Society
Title of ser.: Electrochemical Society Proceedings Series
Ser. no.: 98-1(1)
7.

Conference Proceedings

Conference Proceedings
Ono, T. ; Asayama, E. ; Horie, H. ; Hourai, M. ; Sueoka, K. ; Tsuya, H. ; Rozgonyi, G.A.
Pub. info.: Silicon materials science and technology : proceedings of the Eighth International Symposium on Silicon Materials Science and Technology.  pp.1113-1125,  1998.  Pennington, NJ.  Electrochemical Society
Title of ser.: Electrochemical Society Proceedings Series
Ser. no.: 98-1(2)
8.

Conference Proceedings

Conference Proceedings
Weber, E.R. ; Tsuya, H.
Pub. info.: Proceedings of the Seventh International Symposium on Silicon Materials Science and Technology.  pp.771-771,  1994.  Pennington, NJ.  Electrochemical Society
Title of ser.: Electrochemical Society Proceedings Series
Ser. no.: 1994-10
9.

Conference Proceedings

Conference Proceedings
Hourai, M. ; Ono, T. ; Umeno, S. ; Tanaka, T. ; Asayaoia, E. ; Nishikawa, H. ; Sano, M. ; Tsuya, H.
Pub. info.: Crystalline defects and contamination: their impact and control in device manufacturing III : DECON 2001 : proceedings of the Satellite Symposium to ESSDERC 2001, Nuremberg, Germany.  pp.19-34,  2001.  Pennington, N.J..  Electrochemical Society
Title of ser.: Electrochemical Society Proceedings Series
Ser. no.: 2001-29
10.

Conference Proceedings

Conference Proceedings
Adachi, N. ; Hisatomi, T. ; Sano, M. ; Tsuya, H.
Pub. info.: Silicon materials science and technology : proceedings of the Eighth International Symposium on Silicon Materials Science and Technology.  pp.698-706,  1998.  Pennington, NJ.  Electrochemical Society
Title of ser.: Electrochemical Society Proceedings Series
Ser. no.: 98-1(1)