1.
|
Technical Paper
|
Bhasin, K. ; Linsky, T. ; Hayden, J. ; Tseng, S.
Pub. info.: |
AIAA meeting papers on disc. 2005. [Reston, Va.]. American Institute of Aeronautics and Astronautics |
Title of ser.: |
AIAA Paper : AIAA Space Conference and Exposition |
Ser. no.: |
2005 |
|
2.
|
Conference Proceedings
|
Park, C. ; Lee, J. ; Yang, K. ; Tseng, S. ; Min, Y.-H ; Yang, H. ; Yim, D. ; Kim, J.
Pub. info.: |
Optical Microlithography XIX. pp.61540F-, 2006. Bellingham, Wash.. SPIE - The International Society of Optical Engineering |
Title of ser.: |
Proceedings of SPIE - the International Society for Optical Engineering |
Ser. no.: |
6154 |
|