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High Performance, Highly Reliable Gate Oxide Formed with Rapid Thermal Oxidation In-Situ Steam Generation (ISSG) Technique

Author(s):
Ma, Y.
Chen, Y.N.
Brown, M.M
Li, F.
Chen, Y.
Eng, J., Jr.
Opila, R.L.
Chabal, Y.J.
Sapjeta, J.
Muller, D.A.
Xing, G.C.
Trowbridge, T.
Khau, M.
Tam, N.
9 more
Publication title:
Rapid thermal and other short-time processing technologies : proceedings of the international symposium
Title of ser.:
Electrochemical Society Proceedings Series
Ser. no.:
2000-9
Pub. Year:
2000
Page(from):
179
Page(to):
186
Pages:
8
Pub. info.:
Pennington, NJ: Electrochemical Society
ISSN:
01616374
ISBN:
9781566772747 [1566772745]
Language:
English
Call no.:
E23400/2000-9
Type:
Conference Proceedings

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