Interferometers with diffraction on dot aperture for testing of shape errors of precise surfaces

Author(s):

• Kirillovsky, V.K. ( St. Petersburg State Institute of Fine Mechanics and Optics (Russia) )
• Voznesensky, N.B. ( St. Petersburg State Institute of Fine Mechanics and Optics (Russia) )
• Troukhine, M.M. ( St. Petersburg State Institute of Fine Mechanics and Optics (Russia) )
• Lee, K.-H. ( Korea Electrotechnology Research Institute (South Korea) )

Publication title:

Laser-Assisted Micro- and Nanotechnologies 2003

Title of ser.:

Proceedings of SPIE - the International Society for Optical Engineering

Ser. no.:

5399

Pub. Year:

2004

Page(from):

77

Page(to):

87

Pages:

11

Pub. info.:

Bellingham, Wash.: SPIE - The International Society of Optical Engineering

ISSN:

0277786X

ISBN:

9780819453228 [0819453226]

Language:

English

Call no.:

P63600/5399

Type:

Conference Proceedings