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CHARACTERIZATION OF SPUTTER DEPISITED Al-NITRIDE AND Al-OXIDE BYX-RAY PHOTOELECTRON LOSS SPECTROSCOPY

Author(s):
Publication title:
Defect properties and processing of high-technology nonmetallic materials : symposium held December 2-4, 1985, Boston, Massachusetts, U.S.A.
Title of ser.:
Materials Research Society symposium proceedings
Ser. no.:
60
Pub. Year:
1986
Page(from):
379
Page(to):
386
Pages:
8
Pub. info.:
Pittsburgh, Pa.: Materials Research Society
ISSN:
02729172
ISBN:
9780931837258 [0931837251]
Language:
English
Call no.:
M23500/60
Type:
Conference Proceedings

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