1.

Conference Proceedings
Conference Proceedings
1. Epilayer Quality and Yield Improvement Using the Surface Charge Profiler as a Non-Destructive Technique
Nguyen,MC. ; Tower,J.P. ; Danel,A.
Pub. info.: Analytical and diagnostic techniques for semiconductor materials, devices and processes : joint proceedings of the symposia on ALTECH 99, satellite symposium to ESSDERC 99, Leuven, Belgium [and] the Electrochemical Society Symposium on Diagnostic Techniques for Semiconductor Materials and Devices.  pp.408-418,  1999.  Pennington, N.J..  SPIE - The International Society for Optical Engineering
Title of ser.: Proceedings of SPIE - the International Society for Optical Engineering
Ser. no.: 3895
2.

Conference Proceedings
Conference Proceedings
2. Using the surface charge profiler for in-tine monitoring of doping concentration in silicon epitaxial wafer manufacturing
Tower,J.P. ; Kamieniecki,E. ; Nguyen,M.C. ; Danel,A.
Pub. info.: In-Line Methods and Monitors for Process and Yield Improvement.  pp.174-181,  1999.  Bellingham, Wash..  SPIE - The International Society for Optical Engineering
Title of ser.: Proceedings of SPIE - the International Society for Optical Engineering
Ser. no.: 3884