1.

Conference Proceedings

Conference Proceedings
Staecker, J. ; Arendt, S. ; Schumacher, K. ; Mos, E.C. ; van Haren, R.J. ; van der Schaar, M. ; Edart, R. ; Demmerie, W. ; Tolsma, H.
Pub. info.: Metrology, Inspection, and Process Control for Microlithography XVI.  Part Two  pp.927-936,  2002.  Bellingham, Wash..  SPIE-The International Society for Optical Engineering
Title of ser.: Proceedings of SPIE - the International Society for Optical Engineering
Ser. no.: 4689
2.

Conference Proceedings

Conference Proceedings
Huijbregste, J. ; Haren, R.J.F. ; Jeunink, A. ; Hinnen, P.C. ; Swinnen, B. ; Navarro, R. ; Simons, G. ; Bilsen, F. ; Tolsma, H. ; Megens, H.J.L.
Pub. info.: Metrology, Inspection, and Process Control for Microlithography XVII.  2  pp.918-928,  2003.  Bellingham, WA.  SPIE-The International Society for Optical Engineering
Title of ser.: Proceedings of SPIE - the International Society for Optical Engineering
Ser. no.: 5038