1.

Conference Proceedings

Conference Proceedings
Tokuda, J. ; Takai, M. ; Gamo, K. ; Namba, S.
Pub. info.: Laser and particle-beam chemical processing for microelectronics : symposium held December 1-3, 1987, Boston, Massachusetts, USA.  pp.261-266,  1988.  Pittsburgh, Pa..  Materials Research Society
Title of ser.: Materials Research Society symposium proceedings
Ser. no.: 101
2.

Conference Proceedings

Conference Proceedings
Takai, M. ; Tokuda, J. ; Nakai, H. ; Gamo, K. ; Namba, S.
Pub. info.: Laser-controlled chemical processing of surfaces : symposium held November 1983 in Boston, Massachusetts, U.S.A..  pp.211-216,  1984.  New York.  North-Holland
Title of ser.: Materials Research Society symposium proceedings
Ser. no.: 29